Archive
Date | Title | Authors | Lead Text |
---|---|---|---|
2016‑07 | Highly Ozonized UPW and Its Impact On Filters | Jochen Ruth & Gerd Heser | The use of highly ozonized ultrapure water (UPW*) in advanced semiconductor manufacturing process... |
2015‑12 | How Can Preventative Maintenance Of Filters Ensure The Highest Quality UPW At Lowest Cost Of Ownership? | Gerd Heser & Jochen Ruth | In today’s advanced semiconductor fabs, ultrafiltration (UF) is used as the final filter step in ... |
2013‑04 | Upgrade of Condensate Water Filtration Systems with High-Efficiency Disposable Filters | Kal Farooq | Many power plants with designs of condensate polishers that date to the 1960s and early 1970s wer... |
2009‑11 | Measurement of Sub-50-nm Particle Retention by UPW Filters | Don Grant & Uwe Beuscher | The critical features size of state-of-the-art semiconductor devices is on the order of 50 nanome... |
1993‑12 | Filtration performance of deionized water filters when challenged with colloidal silica solutions | Kevin Pate & Lisa Hollister |
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