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Date Title Authors Lead Text
2016‑07 Highly Ozonized UPW and Its Impact On Filters Jochen Ruth & Gerd Heser The use of highly ozonized ultrapure water (UPW*) in advanced semiconductor manufacturing process...
2015‑12 How Can Preventative Maintenance Of Filters Ensure The Highest Quality UPW At Lowest Cost Of Ownership? Gerd Heser & Jochen Ruth In today’s advanced semiconductor fabs, ultrafiltration (UF) is used as the final filter step in ...
2013‑04 Upgrade of Condensate Water Filtration Systems with High-Efficiency Disposable Filters Kal Farooq Many power plants with designs of condensate polishers that date to the 1960s and early 1970s wer...
2009‑11 Measurement of Sub-50-nm Particle Retention by UPW Filters Don Grant & Uwe Beuscher The critical features size of state-of-the-art semiconductor devices is on the order of 50 nanome...
1993‑12 Filtration performance of deionized water filters when challenged with colloidal silica solutions Kevin Pate & Lisa Hollister

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