Examining a Photochemical Process for Use in Water Purification

By Mark Owen, Tom Hawkins, Ph.D., and Dave Moser

High-Purity

Behavior of Metal Deposition from High-Purity Water During Wafer Rinsing Process

By Drew Sinha, Ph.D., Jeff Chapman, and Richard Godec

Membranes

Membrane Process Offers Improved Water Recovery

By Hu Fleming, Ph.D., and Riad Al-Samadi, Ph.D.

Process to purify POU water for immersion lithography

By Bipin Parekh

RO & DI pretreatment to remove oils and organics and allow for process water reuse

By Kirk Abbott & Doug Dittburner

Monitoring membrane separation processes in high-purity water application

By Jim Elliott & Carl Hickman

Water chemistry and the hyperfiltration or reverse osmosis process

By Lee Comb

Detection and optimization of hydrogen peroxide in processed DI water using ion chromatography

By Jason Roethig & George Smith

The role of process simulation in evaluating water recycling opportunities at a semiconductor fabrication facility

By Demetri Petrides et al.

Minimization of water usage for BOE etch processess

By Kimberley L. Ogden

Ionic and particulate contamination of SPM process rinse waters

By Drew Sinha & Henryson Omoregie