Ozone injection system for bacterial control and sterilization in high-purity water
By Tracy Boswell et al.
Water conservation and materials issues in microelectronics production
By Thomas M. Laronge & Mark A. Lisin
Analysis of bacterial contamination in different sections of a high-purity water system
By Morven B. McAlister et al.
Advanced fluoropolymers for semiconductor process systems: Surface properties of E-CTFE
By Gary Stanitis & Gary H. Husted
A comparative study of bacterial attachment to high-purity water system surfaces
By Richard J. Gillis & John R. Gillis
Response of oligotrophic biofilm bacteria in high-purity water systems to stepwise nutrient supplementation
By Gary R. Husted et al.
Response of laser particle monitor to bacterial challenges in high-purity water
By Timothy P. Clancy