Ultra Pure Water

Date	Title	Authors
2006‑04	The use of membrane distillation in high-purity water production for the semiconductor industry	Chuanfeng Liu & Andrew Martin
2005‑10	Recycling high-purity rinsewater at Samsung Austin Semiconductor	Chris Thompson & edward Lickteig
2005‑09	Optimizing industrial water management in semiconductor applications	Pablo Embon
2005‑06	Determining semiconductor water quality guidelines: Today and Tomorrow	Sarah Schoen et al.
2005‑02	TOC monitoring and its significance to the semiconductor, power, steam generation, and pharmaceutical industry	Anthony C. Bevilacqua et al.
2004‑08	Trends in semiconductor water treatment	David H. Paul
2004‑03	Calibration of resistivity measurements in the semiconductor industry	Anthony C. Bevilacqua et al.
2003‑06	Reclaimed water_An alternative source for high-purity water production in the semiconductor industry	Bala Viswanath et al.
2003‑06	Control models of a high-purity recovery system for semiconductor IC assembley processes	Ming Wu et al.
2003‑04	Water reclaim at the Philips semiconductors San Antonio wafer FAB	John A. Weems
2002‑10	Optimization of high-purity water systems for small and medium semiconductor plants	Ming Wu
2002‑08	The role of process simulation in evaluating water recycling opportunities at a semiconductor fabrication facility	Demetri Petrides et al.
2001‑12	Interaction of metallic contamination from liquids and solid surface in semiconductor processing	Steven Verhaverbeke
2001‑10	Start-up and commissioning of a semiconductor high-purity water treatment plant	Paul Tan & Roger Wiebusch

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