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Date Title Authors Lead Text
2016‑09 An Approach for Copper and Hydrogen Peroxide Removal from Copper CMP and Solar Cell Wastewater Wismer et al. The advent of copper integrated circuits in semiconductor manufacturing in the late 1990s led to ...
2006‑11 An in-depth study of copper selective resins and activated carbon processes in treating CMP wastewaters Michael W. Wismer & Richard E. Woodling
2005‑08 A progress report on the direct application of imidodiacetic-functional IX resin in Cu CMP waste treatment Phil Fatula & Bruno Hees
2004‑11 State-of-the-art copper CMP wastewater treatment Malek Salamor & Thomas Schramm
2004‑09 Copper CMP wastewater treatment by electrocoagulation Sheng H. Lin & Chen L. Lai
2001‑09 Copper CMP wastewater chemistry and treatment Gerald A. Krulik et al.
2001‑06 Treatment of CMP wastewater in microelectronics applications Malek Salamor
2000‑06 Conceptual design for CMP wastewater recycle Jack Martyak & Steven R. Gagnon

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