Archive
Date | Title | Authors | Lead Text |
---|---|---|---|
2016‑09 | An Approach for Copper and Hydrogen Peroxide Removal from Copper CMP and Solar Cell Wastewater | Wismer et al. | The advent of copper integrated circuits in semiconductor manufacturing in the late 1990s led to ... |
2006‑11 | An in-depth study of copper selective resins and activated carbon processes in treating CMP wastewaters | Michael W. Wismer & Richard E. Woodling | |
2005‑08 | A progress report on the direct application of imidodiacetic-functional IX resin in Cu CMP waste treatment | Phil Fatula & Bruno Hees | |
2004‑11 | State-of-the-art copper CMP wastewater treatment | Malek Salamor & Thomas Schramm | |
2004‑09 | Copper CMP wastewater treatment by electrocoagulation | Sheng H. Lin & Chen L. Lai | |
2001‑09 | Copper CMP wastewater chemistry and treatment | Gerald A. Krulik et al. | |
2001‑06 | Treatment of CMP wastewater in microelectronics applications | Malek Salamor | |
2000‑06 | Conceptual design for CMP wastewater recycle | Jack Martyak & Steven R. Gagnon |
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