Archive
| Date | Title | Authors | Lead Text |
|---|---|---|---|
| 2016‑02 | Is POU Water Recovery And Reuse Practical In Microelectronics Fabs? | Azita Yazdani | In the semiconductor industry, large volumes of high-purity water are used for cleaning and etchi... |
| 2012‑02 | Next Generation of UPW Distribution System for the Next Generation of Semiconductor Fabs | Slava Libman et al. | Effective ultrapure water (UPW*) distribution design is extremely important for the advanced micr... |
| 2007‑11 | PPQ analysis of high-purity DI water used in semiconductor FABs | David Bollinger & Hugh Gotts | |
| 2004‑11 | Part 1: Meeting water requirements for 300-MM FABS | Thomas Fulde |
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