Ultra Pure Water

Date	Title	Authors
2001‑12	Role of high-purity water in future cleaning of silicon wafer by wet cleaning process	Drew Sinha
2001‑03	An examination of pipe self cleaning in high-purity water systems	Jörg Klauer
2000‑09	Cleaning and scale prevention in reverse osmosis systems	Daniel Comstock
2000‑09	Process considerations and source reduction opportunities for high-purity water in wet cleaning of silicon wafer	Drew Sinha
1999‑06	The use of high-purity water in the wafer-cleaning process	Drew Sinha
1998‑10	Membrane technologies in precision cleaning applications	Peter Cartwright
1994‑10	Obstacles to the effective chemical cleaning of a reverse osmosis unit	David H. Paul
1994‑06	New high-purity water cleaning process for tubing used in semiconductor clean-room piping	Johnny Osborne & Jeff Meyers

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