Archive


Table Tiles

Date Title Authors Lead Text
2002‑08 Factors affecting high-purity water mixed-bed ion exchange Carl Galletti & Laura Stitt
2002‑06 Minimization of water usage for BOE etch processess Kimberley L. Ogden
2002‑06 Hydrostatic pressure and leak testing of polymer piping systems used in high-purity water applications Karl-Heinz Mayer et al.
2002‑06 Ionic and particulate contamination of SPM process rinse waters Drew Sinha & Henryson Omoregie
2002‑06 Improving a high-purity water system by advanced analytical techniques Gregory Carr & Steven Chen
2002‑03 The effect of velocity on high-purity water systems rinse up and requalification Ron Lee et al.
2002‑02 Photolytic destruction of TOC in spent rinse waters by H2O2 and UV radiation Robert P. Donovan
2002‑01 Ozone injection system for bacterial control and sterilization in high-purity water Tracy Boswell et al.
2002‑01 Effects of space velocity on the performance of the final polishing mixed bed in typical high-purity water plants Avijit Dey et al.
2002‑01 Microbiology aspects of industrial and high-purity water treatment Larry Owen
2002‑01 Water conservation and materials issues in microelectronics production Thomas M. Laronge & Mark A. Lisin
2001‑12 Role of high-purity water in future cleaning of silicon wafer by wet cleaning process Drew Sinha
2001‑10 Start-up and commissioning of a semiconductor high-purity water treatment plant Paul Tan & Roger Wiebusch
2001‑10 A case study in the use of EDI for the production of electronics-grade water J. H. Wood et al.

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