Archive

April 2006

The use of membrane distillation in high-purity water production for the semiconductor industry

By Chuanfeng Liu & Andrew Martin

October 2005

Recycling high-purity rinsewater at Samsung Austin Semiconductor

By Chris Thompson & edward Lickteig

September 2005

Optimizing industrial water management in semiconductor applications

By Pablo Embon

June 2005

Determining semiconductor water quality guidelines: Today and Tomorrow

By Sarah Schoen et al.

February 2005

TOC monitoring and its significance to the semiconductor, power, steam generation, and pharmaceutical industry

By Anthony C. Bevilacqua et al.

August 2004

Trends in semiconductor water treatment

By David H. Paul

March 2004

Calibration of resistivity measurements in the semiconductor industry

By Anthony C. Bevilacqua et al.

June 2003

Reclaimed water_An alternative source for high-purity water production in the semiconductor industry

By Bala Viswanath et al.

Control models of a high-purity recovery system for semiconductor IC assembley processes

By Ming Wu et al.

April 2003

Water reclaim at the Philips semiconductors San Antonio wafer FAB

By John A. Weems

October 2002

Optimization of high-purity water systems for small and medium semiconductor plants

By Ming Wu

August 2002

The role of process simulation in evaluating water recycling opportunities at a semiconductor fabrication facility

By Demetri Petrides et al.

December 2001

Interaction of metallic contamination from liquids and solid surface in semiconductor processing

By Steven Verhaverbeke

October 2001

Start-up and commissioning of a semiconductor high-purity water treatment plant

By Paul Tan & Roger Wiebusch