Particulate contamination control in high-purity water for the semiconductor industry
By Dennis Capitanio et al.
Laser particle monitoring response observations in electronic-grade high-purity water
By Roy Hango & Tim Clancy
Chracterization of organic impurities in high-purity water systems by AOC and TOC
By Robert R. Governal et al.
Electrode pair for measurement of parts per trillion sodium ion in high-purity water systems
By Martin S. Frant & Charles S. Baer
Oxidation and removal of organic particles in high-purity water systems using ozone and UV
By Robert A. Governal & Farhang Shadman
Response of laser particle monitor to bacterial challenges in high-purity water
By Timothy P. Clancy
Two new techniques for particle contamination monitoring in water
By James L. Dwyer & Clifford F. Frith