R&D Patent Trends 1992-2002: The evolving distribution of technical approaches to UPW for Microelectronics
By Michael Bigwood, PhD
What Are The Purity Requirements For Microelectronics UPW Piping/Distribution Systems?
By Frank Patrick
Dynamic Distribution Modeling To Optimize Point-of-use Supply Pressure
By John Morgan and Matthew Weglewski
Fluoropolymer Applications in High-Purity Water Distribution Systems
By Giovanni Biressi, Ph.D., Kris Haggard, Ph.D., and Brigitte Neubauer, Ph.D.
Performance Qualified UV System for Use in Purified Water Treatment and Distribution
By Andrew Clark et al.
Part 2: Ozone Sterilization of PVDF Piping Systems for High-Purity Water Distribution
By Giovanni Biressi & Brigitte Neubauer
Effect of the Vapor-Liquid Distribution Ratio On Amine Use in Boiler Water
By Nicholas Martyak, Ph.D.
Next Generation of UPW Distribution System for the Next Generation of Semiconductor Fabs
By Slava Libman et al.
Recent trends in design and installation of high-purity water plants and distribution systems
By Srinivas Kasilanka & Andreas Neuber
Part 1: Flow requirements, pressure differential, and pressure control of distribution systems
By David S. Buesser