Extending the Value of Resistivity to Optimize Microelectronics Water System Operation
By David M Gray, and Philippe Rychen
Calibration of resistivity measurements in the semiconductor industry
By Anthony C. Bevilacqua et al.
Correlation of boron breakthrough versus resistivity and dissolved silica in RO & DI system
By Sushma Malhotra et al.
Unique temperature compensation for conductivity and resistivity measurements
By David M. Gray & Anthony C. Bevilacqua
Measurement of the resistivity of high-purity water at elevated temperatures
By Kenneth R. Morash et al.