Meeting the ITRS Roadmap Guidelines for Particle Measurements in SEMICONDUCTOR High-Purity Water
By Bill Shade
Calibration of resistivity measurements in the semiconductor industry
By Anthony C. Bevilacqua et al.
Combination electrodes with platinum redox reference systems for on-line pH measurements
By Steven West et al.
Unique temperature compensation for conductivity and resistivity measurements
By David M. Gray & Anthony C. Bevilacqua