Examining a Photochemical Process for Use in Water Purification
By Mark Owen, Tom Hawkins, Ph.D., and Dave Moser
Behavior of Metal Deposition from High-Purity Water During Wafer Rinsing Process
By Drew Sinha, Ph.D., Jeff Chapman, and Richard Godec
Controlled Di Water Gasification System For Advanced Semiconductor Cleaning Processes
By Annie Xia et al.
Water Conservation Using Closed-Loop, Evaporative Systems for Process and Power Applications
By Peter G. Demakos, P.E., and Brian Demers
Membrane Process Offers Improved Water Recovery
By Hu Fleming, Ph.D., and Riad Al-Samadi, Ph.D.
RO & DI pretreatment to remove oils and organics and allow for process water reuse
By Kirk Abbott & Doug Dittburner
Monitoring membrane separation processes in high-purity water application
By Jim Elliott & Carl Hickman
Detection and optimization of hydrogen peroxide in processed DI water using ion chromatography
By Jason Roethig & George Smith
The role of process simulation in evaluating water recycling opportunities at a semiconductor fabrication facility
By Demetri Petrides et al.