Purification Total Organic Carbon (TOC) Monitoring

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Abstract

The measurement of total organic carbon (TOC) within the semiconductor industry continues to be an area of increasing interest. With ever increasing wafer sizes, the requirements for high-purity water production, specifically TOC measurement, are of constant concern. Therefore, trend monitoring of TOC, even in small single loops, is becoming more important. Although on-line instruments have been available for quite some time, operators are hesitant to switch to continuous on-line monitoring because of high cost of ownership, complicated and expensive maintenance, and rather large investments. This article highlights the most commonly used measuring techniques for TOC monitoring and introduces ways to reduce maintenance by implementing new, automatic Quality Assurance procedures. Furthermore, implementing automatic instrument verification procedures and integrated sample preparation also enhances reproducibility and reliability of online data. These are both illustrated in this paper, along with examples from various semiconductor applications.

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