Microelectronics

Part 1: An Overview Of LC-OCD - Organic Speciation For Critical Analytical Tasks In The Semiconductor Industry

By Slava Libman & Stefan Huber

Analytics Organic speciation Total Organic Carbon (TOC)

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Abstract

Organic speciation in water presents one of the more complex analytical challenges due to the difficulty of obtaining detailed measurements about organic composition, using fast, sensitive, and at the same time cost-effective methods. Knowing the composition of dissolved organics may result in significant benefits to the operations of the ultrapure water reclaim, and wastewater treatment systems. This report focuses on important issues for the semiconductor industry. Topics addressed include reverse osmosis, treatment standards, TOC, and UV.

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