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Abstract

High-purity water systems and technologies have evolved during recent decades along with and driven by semiconductor technology needs. The development has been mainly driven by the growing purity requirements, infrastructure, challenges, cost opportunities, and operational reliability. Single short-term interruptions to production in the semiconductor industry often result in multimillion dollar impacts.High-purity water systems and technologies have evolved during recent decades along with and driven by semiconductor technology needs. The development has been mainly driven by the growing purity requirements, infrastructure, challenges, cost opportunities, and operational reliability. Single short-term interruptions to production in the semiconductor industry often result in multimillion dollar impacts.

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