High-Purity

High-Purity Water Analytical Technology for Sub 50-nm Devices

By Ikunori Yokoi et al.

PPQ analysis of high-purity DI water used in semiconductor FABs

By David Bollinger & Hugh Gotts

Recovery of IX resins regeneration rinses in high-purity water manufacturing plants

By Alessandro Beretta

Use of reynolds number as a criteria for design of high-purity water systems

By Slava Libman

The use of membrane distillation in high-purity water production for the semiconductor industry

By Chuanfeng Liu & Andrew Martin

Rouging: The phenomenon and its control in high-purity water systems

By Russell D. Kane

Part 1: Advancements in the design and simulation of UV reactors aid chloramines reduction in high-purity water

By Ben Adelstein et al.

Removal of dissolved oxygen from high-purity water_Much ADO about nothing

By John H. Rydzewski

Monitoring membrane separation processes in high-purity water application

By Jim Elliott & Carl Hickman

Qualifying new raw materials for use in high-purity water system components

By Jeff Hanson et al.

Recycling high-purity rinsewater at Samsung Austin Semiconductor

By Chris Thompson & edward Lickteig

Measurement results of low concentrations of peroxide in a high-purity water system

By Toshikazy Abe et al.

Part 2: Implementation of a high-purity water system in a 300-MM FAB

By Thomas Fulde