ION EXCHANGE MEMBRANES MICROFILTRATION REVERSE OSMOSIS SEMICONDUCTORS TOC ULTRAVIOLET

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Abstract

This article provides a brief overview and description of the main components of a microelectronics water treatment system. In the microelectronics industry, the water produced is generally called ultrapure water (UPW). UPW is being produced at many facilities today with a resistivity of 18.2 (or 18.3) megohm-cm, TOC (total oxidizable carbon, or total organic carbon) concentration of 500 parts per trillion (ppt) (nanograms per liter [ng/L]) or less, and ppt or smaller levels of essentially all inorganic species. Some systems are producing such high quality UPW at over 1,000 gallons per minute (gpm) (227 cubic meters per hour [m3/h])! This is a tremendous accomplishment. UPW is typically considered the purest water on earth.

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