INSTRUMENTS MONITORING SEMICONDUCTORS STANDARDS SODIUM TOC

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Abstract

Smaller node structures and bigger wafer sizes raise the requirement of better high-purity water quality more than ever. Additional parameters such as the particle counts, or trace-level total organic carbon (TOC) measurement, as well as lower acceptable limits for critical species like sodium are mentioned in the International Technology Roadmap for Semiconductors (ITRS) and SEMI F063 guidelines. These technical improvements lead to new challenges for analytical instruments in terms of the limit of detection, accuracy, and reliability. While discussing lower limits of certain species in the water to meet future high-purity water requirements, the potential of an analytical instrument measuring and providing reliable values at such trace levels is mostly neglected. Even a ﾓsimpleﾔ potentiometric sodium measurement requires tough controlling of the influence parameters, and also proper quality assurance to ensure that the measurement is performed correctly and deviations are recognized reliably.

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