Chlorine Particles Total Organic Carbon (TOC) Ultrafiltration

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Abstract

With the explosive expansion in Malta, NY, there has been much interest in the ultrapure water/wastewater (UPW*/WW) innovations we have implemented at GLOBALFOUNDRIES. The original 8.1 UPW system completed in 2011has been modified at a cost of more than $20 million. This cost included design changes to address system challenges and expand the flowrate of the original 2,100 gallons per minute (gpm) to nearly 3,200 gpm. I arrived at the site on April 3, 2010, and at that time, with support from GLOBALFOUNDRIES’ Dresden, Germany, M&W was overseeing the design of the UPW system. The site now has two large UPW systems supporting nearly 300,000 square feet of cleanroom space.

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