BACTERIA EQUIPMENT FILTERS MICROBIALS MAINTENANCE MONITORING PARTICLES SEMICONDUCTORS

Abstract

Method to irradiate a liquid

Inventor: Bruce Lee Coulter

Assignee: Evoqua Water Technologies, LLC (Warrendale, PA)

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Cleaning and sterilizing method for UPW manufacturing system

Inventor: Ikunori Yokoi

Assignee: Kurita Water Industries Ltd. (Tokyo, Japan)

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