Archive
| Date | Title | Authors | Lead Text |
|---|---|---|---|
| 2010‑12 | PART 6: Semiconductor Industry Growth Likely to Skew toward Asia | Mike Henley | Peeaks and valleys. To some, the scenery one might witness in mountainous regions can help provi... |
| 2010‑10 | Critical Ultrapure Water Applications for the Semiconductor Industry | Alan Knapp & Gareth Thomas | Investigating methods for improving the removal of inorganic and organic contaminants, perceived ... |
| 2009‑11 | Transient Boron Leakage in a Semiconductor Water System | Lindsey Stahl & Jeff Chapman | The presence of boron in ultrapure water (UPW*) for semiconductors has until recently been monito... |
| 2009‑11 | Controlled Di Water Gasification System For Advanced Semiconductor Cleaning Processes | Annie Xia et al. | To meet the cleaning requirements for wafers with features below 65-nanometers (nm) or incorporat... |
| 2009‑05 | Meeting the ITRS Roadmap Guidelines for Particle Measurements in SEMICONDUCTOR High-Purity Water | Bill Shade | Deionized (DI) water is used throughout electronics manufacturing. In semiconductor manufacturin... |
| 2009‑05 | Detection of Nano-particles in Semiconductor Water | Slava Libman et al. | The International Technology Roadmap for Semiconductors (ITRS) ultrapure water (UPW*) technical w... |
| 2008‑11 | Use of Nonvolatile Residue Monitoring in Semi-conductor Water Applications | David Blackford et al. | |
| 2008‑11 | Use of Nonvolatile Residue Monitoring in Semiconductor Water Applications | David Blackford, Ph.D. | Nonvolatile residue (NVR) consists of dissolved inorganic material. NVR is primarily silica (bot... |
| 2008‑10 | Achieving Ultra-Low-Level Measurement of Anions and Cations in Semiconductor High-Purity Water | S.M. Rahmat Ullah et al. | High-purity water is of utmost importance in the semiconductor industry. Parameters such as sili... |
| 2008‑09 | Development of Trace Metal Analyzer for Use in Semiconductor Water Treatment | Vladimir Dozortsev et al. | The role of automated metal ion contamination monitoring in semiconductor water system as well as... |
| 2008‑05 | Emerging Applications of High-Purity Water: Meeting Challenges of Advanced Semiconductor Manufacturing | Bipin Parekh | Wet cleaning processes continue to advance to meet the challenges of manufacturing semiconductor ... |
| 2007‑11 | PPQ analysis of high-purity DI water used in semiconductor FABs | David Bollinger & Hugh Gotts | |
| 2006‑11 | Short-bed IX and its potential application in semiconductor water treatment | Michael Sheedy & Michael Dejak | |
| 2006‑06 | Improvements of semiconductor water treatment using spiral-wound EDI | Thomas Menzel & Swen Beusshausen |
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